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    Title :

    Novel interconnection technology for heterogeneous integration of MEMS–LSI multi-chip module


    Contributors:
    Lee, K. W. (author) / Koyanagi, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 3 ; 441-447


    Publication date :

    2010-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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