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    Title :

    Modeling and simulation of levitation control for a micromachined electrostatically suspended gyroscope


    Contributors:
    Xiao, Q. (author) / Chen, W. (author) / Li, S. (author) / Cui, F. (author) / Zhang, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 3 ; 357-366


    Publication date :

    2010-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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