High standoff dual-mode-actuation MEMS switches
MICROSYSTEM TECHNOLOGIES ; 15 , 5 ; 777-787
2009-01-01
11 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Low-Actuation-Voltage MEMS for 2-D Optical Switches
British Library Online Contents | 2006
|IEEE | 2001
|British Library Conference Proceedings | 2001
|