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    Title :

    Nanomechanical Properties of Passivation Thin Films in Integrated Circuit


    Contributors:
    Wu, Z. (author) / Wu, X. (author) / Shen, W.-d. (author)

    Published in:

    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    500



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