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    Title :

    A nodal analysis model for the out-of-plane beamshape electrothermal microactuator


    Contributors:
    Li, R. (author) / Huang, Q. A. (author) / Li, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 2 ; 217-225


    Publication date :

    2009-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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