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    Title :

    Quality assurance for micro manufacturing processes and primary-shaped micro components


    Contributors:
    Lanza, G. (author) / Schlipf, M. (author) / Fleischer, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 12 ; 1823-1830


    Publication date :

    2008-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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