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    Title :

    Femtosecond pulse laser interactions with thin silicon films and crater formation considering optical phonons and wave interference


    Contributors:
    Sim, H. S. (author) / Lee, S. H. (author) / Kang, K. G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1439-1446


    Publication date :

    2008-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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