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    Title :

    Effect of applying ultrasonic vibration in thermal nanoimprint lithography


    Contributors:
    Mekaru, H. (author) / Noguchi, T. (author) / Goto, H. (author) / Takahashi, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1325-1333


    Publication date :

    2008-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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