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    Title :

    Design and fabrication of an electrochemically actuated microvalve


    Contributors:
    Lee, D. E. (author) / Soper, S. (author) / Wang, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1751-1756


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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