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    Title :

    Validation of micromechanical systems


    Contributors:
    Albers, A. (author) / Burkardt, N. (author) / Deigendesch, T. (author) / Ellmer, C. (author) / Hauser, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1481-1485


    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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