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    Title :

    Fabrication of micro sloping structures of SU-8 by substrate penetration lithography


    Contributors:
    Onishi, J. (author) / Makabe, K. (author) / Matsumoto, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1305-1310


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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