Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Low-stress fabrication of 3D polymer free standing structures using lamination of photosensitive films


    Contributors:
    Abgrall, P. (author) / Charlot, S. (author) / Fulcrand, R. (author) / Paul, L. (author) / Boukabache, A. (author) / Gué, A. M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 8 ; 1205-1214


    Publication date :

    2008-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Free-standing coating patterns fabricated by ultraviolet contact lithography using photosensitive sol-gel coatings

    Xiang, Youlai / Du, Ai / Li, Xiaoguang et al. | British Library Online Contents | 2017


    Fabrication of Gratings Using Photosensitive Gel Films by Sol-Gel Process

    Gaoyang, Z. / Li, Y. / Zhang, W. et al. | British Library Conference Proceedings | 2005