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    Title :

    Development and application of a diaphragm micro-pump with piezoelectric device


    Contributors:
    Ma, H. K. (author) / Hou, B. R. (author) / Wu, H. Y. (author) / Lin, C. Y. (author) / Gao, J. J. (author) / Kou, M. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 7 ; 1001-1007


    Publication date :

    2008-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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