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    Title :

    Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections


    Contributors:
    Lv, B. (author) / Liu, X. (author) / Yang, Z. (author) / Yan, G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 6 ; 711-718


    Publication date :

    2008-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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