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    Title :

    Design and consideration of wafer level micropackaging for distributed RF MEMS phase shifters


    Contributors:
    He, X. j. (author) / Wu, Q. (author) / Jin, B. s. (author) / Tang, K. (author) / Song, M. x. (author) / Yin, J. h. (author) / Zhu, H. c. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 4-5 ; 575-579


    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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