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    Title :

    Gallium arsenide suspended microheater for MEMS sensor arrays


    Contributors:
    Hotovy, I. (author) / Rehacek, V. (author) / Mika, F. (author) / Lalinsky, T. (author) / Hascik, S. (author) / Vanko, G. (author) / Drzik, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 4-5 ; 629-635


    Publication date :

    2008-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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