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    Title :

    Characterization of a novel segmented micro mirror


    Contributors:
    Yu, H. (author) / Wu, P. (author) / Liu, Y. (author) / Li, J. (author) / Chen, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 2 ; 173-177


    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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