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    Title :

    Out-of-plane motion of 260-nm thick guided-mode resonant grating filter controlled by four micro-thermal actuators


    Contributors:
    Kanamori, Y. (author) / Kitani, T. (author) / Hane, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 8-10 ; 867-872


    Publication date :

    2007-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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