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    Title :

    MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive


    Contributors:
    Mehdaoui, A. (author) / Pisani, M. B. (author) / Tsamados, D. (author) / Casset, F. (author) / Ancey, P. (author) / Ionescu, A. M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 11-12 ; 1589-1594


    Publication date :

    2007-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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