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    Title :

    Fabrication of diffraction grating for X-ray Talbot interferometer


    Contributors:
    Matsumoto, M. (author) / Takiguchi, K. (author) / Tanaka, M. (author) / Hunabiki, Y. (author) / Takeda, H. (author) / Momose, A. (author) / Utsumi, Y. (author) / Hattori, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 543-546


    Publication date :

    2007-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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