SU-8 3D microoptic components fabricated by inclined UV lithography in water
MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 245-251
2007-01-01
7 pages
Article (Journal)
English
DDC: | 629.83 |
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Monolithically Integrated Resonator Microoptic Gyro on Silica Planar Lightwave Circuit
British Library Online Contents | 2000
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