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    Title :

    SU-8 3D microoptic components fabricated by inclined UV lithography in water


    Contributors:
    Ling, Z. (author) / Lian, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 245-251


    Publication date :

    2007-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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