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    Title :

    Vacuum measurement in wafer level encapsulations by interference microscopy


    Contributors:
    Bosseboeuf, A. (author) / Grandchamp, J. P. (author) / Breluzeau, C. (author) / Lani, S. (author) / Palomo, J. (author) / Bouville, D. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 10-11 ; 1063-1069


    Publication date :

    2006-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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