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    Title :

    Mechanical punching of 15 μm size hole


    Contributors:
    Yi, S. M. (author) / Joo, B. Y. (author) / Park, M. S. (author) / Chu, C. N. (author) / Oh, S. I. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 9 ; 877-882


    Publication date :

    2006-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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