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    Title :

    Micro structuring of borosilicate glass by high-temperature micro-forming


    Contributors:
    Schubert, A. (author) / Edelmann, J. (author) / Burkhardt, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 8 ; 790-795


    Publication date :

    2006-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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