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    Title :

    Bonded thick film SOI with pre-etched cavities


    Contributors:
    Suni, T. (author) / Henttinen, K. (author) / Dekker, J. (author) / Luoto, H. (author) / Kulawski, M. (author) / Mäkinen, J. (author) / Mutikainen, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 5 ; 406-412


    Publication date :

    2006-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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