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    Title :

    Wet etching of silicon gratings with triangular profiles


    Contributors:
    Frühauf, J. (author) / Krönert, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 12 ; 1287-1291


    Publication date :

    2005-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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