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    Title :

    Fabrication of a ZnO piezoelectric micro cantilever with a high-aspect-ratio nano tip


    Contributors:
    Lee, S. H. (author) / Lee, S. S. (author) / Choi, J. J. (author) / Jeon, J. U. (author) / Ro, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 6 ; 416-423


    Publication date :

    2005-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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