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    Title :

    Coupling bulge testing and nanoindention to characterize materials properties of bulk micromachined structures


    Contributors:
    Kennedy, M. S. (author) / Olson, A. L. (author) / Raupp, J. C. (author) / Moody, N. R. (author) / Bahr, D. F. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 4/5 ; 298-302


    Publication date :

    2005-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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