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    Title :

    Fabrication of ceramic microcomponents using deep X-ray lithography


    Contributors:
    Muller, C. (author) / Hanemann, T. (author) / Wiche, G. (author) / Kumar, C. (author) / Goettert, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 4/5 ; 271-277


    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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