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    Title :

    Two-dimensional stress measurement of a micro-machined piezoresistive structure with micro-Raman spectroscopy


    Contributors:
    Qian, J. (author) / Yu, T.-X. (author) / Zhao, Y.-P. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 2/3 ; 97-103


    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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