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    Title :

    Incorporating design rules into the LIGA technology applied to a fourier transformation spectrometer


    Contributors:
    Solf, C. (author) / Janssen, A. (author) / Mohr, J. (author) / Ruzzu, A. (author) / Wallrabe, U. (author)

    Published in:

    Publication date :

    2004-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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