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    Title :

    Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures


    Contributors:
    Bhushan, B. (author) / Kasai, T. (author) / Nguyen, C. V. (author) / Meyyappan, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 10 , 8/9 ; 633-639


    Publication date :

    2004-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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