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    Title :

    MEMS OPTICS Diffractive MEMS: a versatile tool


    Contributors:
    Senturia, S. D. (author) / Ramani, M. (author) / Geller, Y. (author)

    Published in:

    LASER FOCUS WORLD ; 40 , 7 ; 111-115


    Publication date :

    2004-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366



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