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    Title :

    Piezoelectric thin films formed by MOD on cantilever beams for micro sensors and actuators


    Contributors:
    Cui, T. (author) / Markus, D. (author) / Zurn, S. (author) / Polla, D. L. (author)

    Published in:

    Publication date :

    2004-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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    Tani, J. / Liu, Y.-Z. / Chonan, S. | British Library Online Contents | 1994


    Shape Control of Beams by Piezoelectric Actuators

    Shengyuan Yang / Bryan Ngoi | AIAA | 2000


    Digital active vibration control of a cantilever beam with piezoelectric actuators

    Tani, J. / Chonan, S. / Liu, Y. et al. | Tema Archive | 1991


    Fabrication of Novel Piezoelectric Micro-Cantilever Probe

    Cui, Y. / Zhang, L. / Xia, J. et al. | British Library Online Contents | 2011