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    Title :

    Side wall roughness in ultradeep X-ray lithography


    Contributors:
    Moldovan, N. (author) / Mancini, D. C. (author) / Divan, R. (author) / Makarova, O. V. (author) / Peele, A. (author) / Podolak, K. R. (author)

    Published in:

    Publication date :

    2002-01-01


    Size :

    3 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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