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    Title :

    Micromachining system accommodates large wafers


    Contributors:
    Bann, R. (author) / Apte, P. (author) / Ostendorf, A. (author) / Korber, K. (author) / Temme, T. (author)

    Published in:

    LASER FOCUS WORLD ; 37 ; 189-194


    Publication date :

    2001-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366



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