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    Title :

    Fabrication of SiGe Optical Waveguides Using VLSI Processing Techniques


    Contributors:
    Pearson, M. R. T. (author) / Jessop, P. E. (author) / Bruce, D. M. (author) / Wallace, S. (author) / Mascher, P. (author) / Ojha, J. (author)

    Published in:

    Publication date :

    2001-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3692



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