Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Micromachined pressure sensors pave way for new process solutions


    Published in:

    CONTROL SOLUTIONS ; 73 , 11 ; 43-52


    Publication date :

    2000-01-01


    Size :

    10 pages


    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.8






    A comparison between micromachined piezoresistive and capacitive pressure sensors

    Baney,W. / Chilcott,D. / Huang,X. et al. | Automotive engineering | 1997


    A Comparison Between Micromachined Piezoresistive and Capacitive Pressure Sensors

    Baney, W. / Chilcott, D. / Huang, X. et al. | British Library Conference Proceedings | 1998