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    Title :

    Multilayer polyimide film substrates for interconnections in microsystems


    Contributors:
    Fach, A. (author) / Athanassov, Y. (author) / Brunner, U. (author) / Habluetzel, D. (author) / Ketterer, B. (author) / Link, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 5 , 4 ; 166-168


    Publication date :

    1999-01-01


    Size :

    3 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83