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    Title :

    Manufacture of diffraction grating on tiny parts by means of ultraprecision milling


    Contributors:
    Sawada, K. (author) / Odaka, S. (author) / Kawai, T. (author) / Hirai, T. (author) / Takeuchi, Y. (author) / Sata, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 5 , 4 ; 157-160


    Publication date :

    1999-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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