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    Title :

    Low Temperature Deposition of SiC Thin Films on Plastics as a Hard Coating by ECR Plasma (I)


    Contributors:
    Sano, K. (author) / Tamamaki, H. (author) / Nomura, M. (author) / Nakanishi, Y. (author) / Hatanaka, Y. (author)


    Publication date :

    1998-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    629.2



    Low Temperature Deposition of SiC Thin Films on Plastics as a Hard Coating by ECR Plasma

    Sano, K. / Tamamaki, H. / Nomura, M. et al. | British Library Online Contents | 1998


    Low Temperature Deposition of SiO~2 Thin Films on Plastics as Hard Coating by ECR Plasma (III)

    Tamamaki, H. / Nomura, M. / Sano, K. et al. | British Library Online Contents | 1998


    Low Temperature Deposition of SiO~2 Thin Films on Plastics as a Hard Coating using TEOS/O~2-plasma (I)

    Sano, K. / Tamamaki, H. / Nomura, M. et al. | British Library Online Contents | 1996


    Low Temperature Deposition of SiO~2 Thin Films on Plastics as a Hard Coating using TEOS/O~2-plasma (II)

    Sano, K. / Tamamaki, H. / Nomura, M. et al. | British Library Online Contents | 1997


    Thin Film Deposition on Plastics by ECR Plasma

    Tamamaki, H. / Nomura, M. / Sano, K. et al. | British Library Online Contents | 1997