Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Manufacturing pinhole arrays for X-ray source diagnostics using LIGA


    Contributors:
    Gerner, M. (author) / Holldack, K. (author) / Luettge, R. (author) / Schmidt, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 4 , 4 ; 184-186


    Publication date :

    1998-01-01


    Size :

    3 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    New LIGA exposure source in China

    Tang, E. / Yi, F. / Zhang, S. B. et al. | British Library Online Contents | 1998



    Pinhole diffraction filter

    Woodgate, B. E. | NTRS | 1977


    Pinhole inspection device

    BAE SEONGHO | European Patent Office | 2025

    Free access

    Replication of LIGA structures using microcasting

    Baumeister, G. / Ruprecht, R. / Hausselt, J. | British Library Online Contents | 2004