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    Title :

    Oxidation of silicon (001) surfaces by hyperthermal atomic oxygen beam at room temperature


    Contributors:
    Tagawa, M. (author)


    Publication date :

    1997-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    500.5 / 387.8



    Oxidation of room temperature silicon (001) surfaces in a hyperthermal atomic oxygen beam

    Tagawa, M. / Ema, T. / Kinoshita, H. et al. | Tema Archive | 1997


    Hyperthermal-Atomic-Oxygen Generator

    Outlaw, R. A. | NTRS | 1993


    Generating Hyperthermal Atomic Oxygen

    Outlaw, Ronald A. | NTRS | 1988


    DSMC Simulations of Hyperthermal Oxygen Beam Exposures

    Cline, Jason / Minton, Timothy / Braunstein, Matthew | AIAA | 2004