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    Title :

    Embedded Channel Polyimide Waveguide Fabrication by Direct Electron Beam Writing Method


    Contributors:
    Maruo, Y. Y. (author) / Sasaki, S. (author) / Tamamura, T. (author)

    Published in:

    Publication date :

    1995-01-01


    Size :

    1718 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    621.3692



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