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    Title :

    Precise nonselective chemically assisted ion-beam etching of AlGaAs/GaAs Bragg reflectors by in situ laser reflectometry


    Contributors:
    Yoo, J. Y. (author) / Shin, J. H. (author) / Lee, Y. H. (author) / Park, H.-H. (author)


    Publication date :

    1995-01-01


    Size :

    421 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    537.5




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