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    Title :

    Characterization of Polysilane-Based Films Produced from Silane or Disilane Plasma at Cryogenic Temperatures


    Contributors:
    Miyazaki, S. (author) / Okamoto, K. (author) / Miyoshi, Y. (author) / Shin, H. (author)

    Published in:

    Publication date :

    1994-01-01


    Size :

    337 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    621.381045



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