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    Title :

    Controlled formation of buried-channel waveguides by electron beam irradiation of glassy layers of silicon


    Contributors:
    Lewandowski, J. (author) / Syms, R. R. A. (author) / Grant, M. (author) / Bailey, S. (author)

    Published in:

    Publication date :

    1994-01-01


    Size :

    143 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    621.381045



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