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    Title :

    Investigation on the interface of polysilicon/oxide in CCD image sensors [9522-48]


    Conference:

    Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II ; 2014 ; Suzhou, China



    Publication date :

    2015-01-01


    Size :

    9522 0L-9522 0L



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





    Investigation on the interface of polysilicon/oxide in CCD image sensors

    L., Naiman / L., Renhao / L., Chunlin | SPIE | 2015



    Front Matter: Volume 9522

    SPIE | 2015

    Free access