Influence of Hydrogen Dilution of Silane on the Properties of nc-Si:H Films Grown by Layer-by-Layer Deposition Technique
SYMPOSIUM D, Semiconductor photonics: nano-structured materials and devices ; 2007 ; Singapore
2008-01-01
3 pages
Includes bibliographical references and index; Held as part of the International conference on materials for advanced technologies (ICMAT) 2007
Conference paper
English
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