Surface Micromachined Elastomer Spatial Light Modulators for Extreme Ultra Violet Radiation
INTERNATIONAL CONFERENCE, Optical MEMS and their applications ; 2004 ; Takamatsu, Japan
2004-01-01
2 pages
Conference paper
English
Optical MEMS , IEEE , LEOS
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Fabrication technology for micromachined spatial light modulators [4944-26]
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